Title:
【発明の名称】露光装置及び方法
Document Type and Number:
Japanese Patent JP2926241
Kind Code:
B2
Inventors:
UEMURA TSUNESABURO
Application Number:
JP11536189A
Publication Date:
July 28, 1999
Filing Date:
May 09, 1989
Export Citation:
Assignee:
NIKON KK
International Classes:
H01L21/30; G03F7/20; H01L21/027; H01S3/101; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP2230712A | ||||
| JP6457774A | ||||
| JP6386593A | ||||
| JP6354786A |
Attorney, Agent or Firm:
Takao Watanabe