Title:
【発明の名称】アクティブマトリックス形液晶表示素子の製造方法およびその装置
Document Type and Number:
Japanese Patent JP2937942
Kind Code:
B2
Inventors:
YANAGISAWA TOSHIO
NOMA AKIRA
NOMA AKIRA
Application Number:
JP11588597A
Publication Date:
August 23, 1999
Filing Date:
May 06, 1997
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
G02F1/13; G03F9/00; H01L21/027; (IPC1-7): H01L21/027; G03F9/00
Domestic Patent References:
| JP60186845A | ||||
| JP55132039A | ||||
| JP59155830A |
Attorney, Agent or Firm:
Togawa Hideaki