Title:
【発明の名称】検査システムおよび電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP2941308
Kind Code:
B2
Abstract:
The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
Inventors:
ISHIKAWA SEIJI
SAKATA MASAO
NAKAZATO JUN
SHIMOSHA SADAO
NAGATOMO HIROTO
TANIGUCHI JUZO
SATO OSAMU
OKABE TSUTOMU
SAKAMOTO JUZABURO
MURAMATSU KIMIO
MATSUOKA KAZUHIKO
HASHIMOTO TAIZO
OOYAMA JUICHI
EBARA
SAKATA MASAO
NAKAZATO JUN
SHIMOSHA SADAO
NAGATOMO HIROTO
TANIGUCHI JUZO
SATO OSAMU
OKABE TSUTOMU
SAKAMOTO JUZABURO
MURAMATSU KIMIO
MATSUOKA KAZUHIKO
HASHIMOTO TAIZO
OOYAMA JUICHI
EBARA
Application Number:
JP17793489A
Publication Date:
August 25, 1999
Filing Date:
July 12, 1989
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
H01L21/66; G01N21/88; G01N21/956; (IPC1-7): H01L21/66
Domestic Patent References:
| JPH01122132A | ||||
| JPS59228726A | ||||
| JPS60171736A | ||||
| JPS6366447A | ||||
| JPS6366446A | ||||
| JPS63220513A | ||||
| JPS5967638A | ||||
| JPS5619635A | ||||
| JPS63135848A | ||||
| JPH01137641A | ||||
| JPS58165337A | ||||
| JPS62220839A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)