Title:
【発明の名称】半導体素子検査機の素子間隙調節装置
Document Type and Number:
Japanese Patent JP2952259
Kind Code:
B2
Abstract:
Device for adjusting a space between chips in a semiconductor chip tester, is disclosed, including a carrier plate mounted movable along a horizontal guide rail, a mounting plate fixed to the carrier plate, an elevating plate mounted on the mounting plate movable in up and down direction by a vertical LM (linear motion) guider, a cam shaft rotatably mounted on the elevating plate, the cam shaft having a plurality of cam grooves formed in a radial direction in an outer circumferential surface, a driving mechanism for rotating the cam shaft, and a plurality of pick-up members each fitted movable in a horizontal direction by a horizontal LM guider in a state a top of each of the pick-up members is inserted in one of the cam grooves.
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Inventors:
BATSUKU U YORU
Application Number:
JP27804998A
Publication Date:
September 20, 1999
Filing Date:
September 30, 1998
Export Citation:
Assignee:
MIRAE CORP
International Classes:
H01L21/66; G01R31/26; H01L21/68; (IPC1-7): G01R31/26
Domestic Patent References:
| JP627193A | ||||
| JP463083U |
Attorney, Agent or Firm:
Hironobu Onda