【発明の名称】表面形状測定装置

Title:

【発明の名称】表面形状測定装置

Document Type and Number:

Japanese Patent JP2959150

Kind Code:

B2

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Inventors:

SEKI MITSURU
ASAE TERUO
MORI SHIGERU

Application Number:

JP5242491A

Publication Date:

October 06, 1999

Filing Date:

March 18, 1991

Export Citation:

Assignee:

NITSUSAN JIDOSHA KK

International Classes:

G01B11/24; (IPC1-7): G01B11/24

Domestic Patent References:

JP197808A

Attorney, Agent or Firm:

Mikio Hatta (2 outside)

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