Title:
【発明の名称】化学増幅型レジスト及びパターン形成方法
Document Type and Number:
Japanese Patent JP2971433
Kind Code:
B2
Inventors:
NAKAZAWA HIROSUKE
Application Number:
JP6980898A
Publication Date:
November 08, 1999
Filing Date:
March 19, 1998
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
G03F7/038; G03F7/004; G03F7/039; H01L21/027; (IPC1-7): G03F7/004; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP9329895A | ||||
| JP451243A | ||||
| JP2296250A | ||||
| JP10186343A |
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)