Title:
【発明の名称】プラズマエッチング装置
Document Type and Number:
Japanese Patent JP2971921
Kind Code:
B2
Inventors:
ARAMI JUNICHI
ENDO TAMIO
KOYAMA SHIRO
HASEGAWA KATSUHIRO
OKANO HARUO
ENDO TAMIO
KOYAMA SHIRO
HASEGAWA KATSUHIRO
OKANO HARUO
Application Number:
JP19246390A
Publication Date:
November 08, 1999
Filing Date:
July 20, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
TOSHIBA KK
TOSHIBA KK
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23F4/00; H01L21/3065
Domestic Patent References:
| JP221620A |
Attorney, Agent or Firm:
Hajime Inoue (1 person outside)