Title:
【発明の名称】断面観察方法
Document Type and Number:
Japanese Patent JP2973211
Kind Code:
B2
Inventors:
IZAI HIROYASU
MINAFUJI TAKASHI
MINAFUJI TAKASHI
Application Number:
JP30842789A
Publication Date:
November 08, 1999
Filing Date:
November 27, 1989
Export Citation:
Assignee:
SEIKOO INSUTSURUMENTSU KK
International Classes:
H01J37/26; G01N1/28; H01J37/30; H01J37/317; H01L21/302; H01L21/3065; H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Keinosuke Hayashi