Title:
【発明の名称】電子ビーム装置による電圧測定方法
Document Type and Number:
Japanese Patent JP2973554
Kind Code:
B2
Abstract:
The method considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage (21) by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.
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Inventors:
OOKUBO KAZUO
ITO AKIO
ABE TAKAYUKI
TEGURI HIRONORI
ITO AKIO
ABE TAKAYUKI
TEGURI HIRONORI
Application Number:
JP5503691A
Publication Date:
November 08, 1999
Filing Date:
March 19, 1991
Export Citation:
Assignee:
FUJITSU KK
International Classes:
G01R19/00; G01R31/302; G01R31/305; H01L21/66; (IPC1-7): G01R19/00; G01R31/302; H01L21/66
Domestic Patent References:
| JP493676A | ||||
| JP3187145A | ||||
| JP356864A | ||||
| JP1147377A |
Attorney, Agent or Firm:
Tetsuo Hirado