Title:
【発明の名称】研磨装置
Document Type and Number:
Japanese Patent JP2976862
Kind Code:
B2
Inventors:
INABA SEIICHI
Application Number:
JP25062095A
Publication Date:
November 10, 1999
Filing Date:
September 28, 1995
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
B24B37/005; B24B37/04; B24B37/30; H01L21/304; (IPC1-7): B24B37/04; H01L21/304
Domestic Patent References:
| JP699348A | ||||
| JP52151995A | ||||
| JP4267540A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)