【発明の名称】クリーンルーム空調システム

Title:

【発明の名称】クリーンルーム空調システム

Document Type and Number:

Japanese Patent JP2987990

Kind Code:

B2

Abstract:

PURPOSE:To prevent an atmosphere in a maintenance area from being mixed in production equipment. CONSTITUTION:An open air is introduced into production equipment 11 from an open air conditioner 8 by way of an open air supply duct 9 and an equipment HEPA filter 10. The air which has penetrated the production equipment is further introduced into a maintenance area which does not call for a higher degree of purity.

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Inventors:

MINOSHIMA MASAHIKO

Application Number:

JP9143991A

Publication Date:

December 06, 1999

Filing Date:

March 29, 1991

Export Citation:

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Assignee:

NIPPON DENKI KK

International Classes:

A23B7/10; F24F3/044; F24F3/16; F24F7/06; (IPC1-7): F24F7/06; F24F3/044

Domestic Patent References:

JP237243A
JP62228826A

Attorney, Agent or Firm:

Sugano Naka

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