Title:
【発明の名称】ウェ-ハ中心検出装置
Document Type and Number:
Japanese Patent JP2988594
Kind Code:
B2
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Inventors:
KONDO NAOYUKI
Application Number:
JP9126691A
Publication Date:
December 13, 1999
Filing Date:
March 28, 1991
Export Citation:
Assignee:
NIDETSUKU KK
International Classes:
G01B11/00; H01L21/68; (IPC1-7): G01B11/00
Domestic Patent References:
| JP252203A |