Title:
【発明の名称】導電性カンチレバーを用いた走査型原子間力顕微鏡
Document Type and Number:
Japanese Patent JP2989724
Kind Code:
B2
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Inventors:
KITAMURA SHINICHI
Application Number:
JP4528693A
Publication Date:
December 13, 1999
Filing Date:
March 05, 1993
Export Citation:
Assignee:
NIPPON DENSHI KK
International Classes:
G01B7/34; G01B21/30; G01N37/00; G01Q30/06; G01Q60/04; G01Q60/10; G01Q60/40; H01J37/28; (IPC1-7): G01B21/30; G01B7/34
Domestic Patent References:
| JP3277903A | ||||
| JP4212252A |
Attorney, Agent or Firm:
Masanobu Ebikawa (7 others)