Title:
【発明の名称】SiCのパターンエッチング方法及びそれを用いたラミナー型SiC回折格子の製造方法
Document Type and Number:
Japanese Patent JP2992596
Kind Code:
B2
Inventors:
KOEDA MASARU
Application Number:
JP35504392A
Publication Date:
December 20, 1999
Filing Date:
December 16, 1992
Export Citation:
Assignee:
KAGAKU GIJUTSUCHO
International Classes:
G02B5/18; C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; C23F4/00; G02B5/18
Domestic Patent References:
| JP4293234A | ||||
| JP1274430A | ||||
| JP63232335A | ||||
| JP54102872A | ||||
| JP52127764A | ||||
| JP60124824A |
Attorney, Agent or Firm:
Ryohei Kobayashi