Title:
【発明の名称】端部欠陥検査方法とその装置
Document Type and Number:
Japanese Patent JP2999712
Kind Code:
B2
Inventors:
Masahiko Takada
Hiroshi Nanzato
Hajime Komatsu
Hiroshi Nanzato
Hajime Komatsu
Application Number:
JP10420296A
Publication Date:
January 17, 2000
Filing Date:
March 29, 1996
Export Citation:
Assignee:
SUMITOMO METAL INDUSTRIES,LTD.
Raytex Co., Ltd.
Raytex Co., Ltd.
International Classes:
G01B11/30; G01N21/88; G01N21/89; G01N21/95; H01L21/66; (IPC1-7): G01N21/88; G01B11/30; H01L21/66
Domestic Patent References:
| JP63208747A | ||||
| JP6275306A |
Attorney, Agent or Firm:
Yoshihisa Oshida