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Title:
減圧洗浄乾燥装置
Document Type and Number:
Japanese Patent JP3005792
Kind Code:
B2
Inventors:
伊藤 達規
山地 信幸
村田 裕康
橘 秀久
Application Number:
JP14945295A
Publication Date:
February 07, 2000
Filing Date:
May 23, 1995
Export Citation:
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Assignee:
株式会社三社電機製作所
International Classes:
B08B3/08; F26B5/04; (IPC1-7): B08B3/08; F26B5/04



 
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