Title:
【発明の名称】半導体製造設備用転がり軸受
Document Type and Number:
Japanese Patent JP3005946
Kind Code:
B2
Inventors:
Hiromitsu Kondo
Takahiro Mizutani
Norihide Satoh
Takahiro Mizutani
Norihide Satoh
Application Number:
JP20356792A
Publication Date:
February 07, 2000
Filing Date:
July 30, 1992
Export Citation:
Assignee:
NTN Corporation
International Classes:
F16C33/62; F16C33/32; F16C33/66; (IPC1-7): F16C33/66; F16C33/32; F16C33/62
Domestic Patent References:
| JP3119095A |
Attorney, Agent or Firm:
Shogo Ehara