Title:
【発明の名称】ワークからウェーハを切断するためのワイヤ鋸及び切断方法
Document Type and Number:
Japanese Patent JP3010426
Kind Code:
B2
Abstract:
A system is provided for follow up of the wire section on the cutting faces provided, with at least one measurement facility and at least one adjustment facility. The measurement facility determines an inaccurate position of the wire section with regard to the cutting faces by measuring the distance up to a place of measurement, the spatial position of which is dependent upon the inaccurate position of the wire section. The adjustment facility, by force transfer, brings about a compensating movement of the wire section through the wire section is brought onto the cutting surfaces.
Inventors:
Carle Eggle Hubbell
Application Number:
JP9180096A
Publication Date:
February 21, 2000
Filing Date:
March 22, 1996
Export Citation:
Assignee:
Wacker Ziltronique Gezelshaft Fuer Halbreiter Materia Lien Akchen Gezelshaft
International Classes:
B24B27/06; B23D57/00; B23D59/00; B23Q15/00; B28D5/04; (IPC1-7): B28D5/04; B24B27/06
Domestic Patent References:
| JP5185419A | ||||
| JP7308920A | ||||
| JP825208A | ||||
| JP61122811U |
Attorney, Agent or Firm:
Tadashi Hagino (3 outside)