Title:
【発明の名称】被検材の表面検査装置
Document Type and Number:
Japanese Patent JP3014297
Kind Code:
B2
Inventors:
Issei Tsujida
Osamu Donishi
Kenichi Fujinami
Osamu Donishi
Kenichi Fujinami
Application Number:
JP14571295A
Publication Date:
February 28, 2000
Filing Date:
May 19, 1995
Export Citation:
Assignee:
Ootsu Steel Ball Manufacturing Co., Ltd.
International Classes:
G01B11/30; G01N21/89; (IPC1-7): G01N21/89; G01B11/30
Domestic Patent References:
| JP6331338A | ||||
| JP763539A | ||||
| JP495864A | ||||
| JP3261849A | ||||
| JP56152798U | ||||
| JP4103065U |
Attorney, Agent or Firm:
Takenobu Samejima