Title:
【考案の名称】微小流量測定装置
Document Type and Number:
Japanese Patent JP3015912
Kind Code:
U
Inventors:
Shoji Iguchi
Sawada Masaru
Wataru Sugiyama
Kamada Shin
Sawada Masaru
Wataru Sugiyama
Kamada Shin
Application Number:
JP206395U
Publication Date:
September 19, 1995
Filing Date:
March 17, 1995
Export Citation:
Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
(IPC1-7): G01F1/34; F04B37/16
Attorney, Agent or Firm:
Fujimoto Noboru