Title:
【発明の名称】エッチング装置
Document Type and Number:
Japanese Patent JP3024148
Kind Code:
B2
Inventors:
Toshiharu Yanagida
Application Number:
JP31572789A
Publication Date:
March 21, 2000
Filing Date:
December 05, 1989
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Domestic Patent References:
| JP5913327A | ||||
| JP63155727A | ||||
| JP63276226A | ||||
| JP62173723A |
Attorney, Agent or Firm:
Toru Takatsuki