Title:
【発明の名称】静電容量の変化を利用したセンサの製造方法
Document Type and Number:
Japanese Patent JP3025313
Kind Code:
B2
Abstract:
PURPOSE:To obtain an efficient manufacture for a sensor suitable for mass production. CONSTITUTION:An electrode layer E1 is formed on the upper surface of a first substrate 100. The substrate is partially removed so as to make it flexible. A second substrate 200 is bonded to the lower surface of the substrate 100. A working body 210 and a stage 220 are formed by cutting the second substrate. On the other hand, a groove 401 is formed in a third substrate 400. An electrode layer E2 is formed at the bottom face of each groove. The third substrate is bonded to the first substrate so that the electrode layers E1 and E2 confront to each other with a predetermined distance. Finally, the first, second and third substrates are cut along a cutting path 510 for every unit area. Accordingly, sensors independent of each other are formed.
Inventors:
Kazuhiro Okada
Application Number:
JP41618890A
Publication Date:
March 27, 2000
Filing Date:
December 31, 1990
Export Citation:
Assignee:
Wako Co., Ltd.
International Classes:
G01L1/14; B81C3/00; G01L5/16; G01L9/00; G01L13/06; G01P15/125; G01P15/18; G01R33/02; H01L29/84; (IPC1-7): G01L1/14; G01L5/16; G01L13/06; G01P15/125; H01L29/84
Domestic Patent References:
| JP2271262A | ||||
| JP2116755A |
Attorney, Agent or Firm:
Hiroshi Shimura