Title:
【発明の名称】薄膜形成装置
Document Type and Number:
Japanese Patent JP3026578
Kind Code:
B2
Inventors:
Masashi Nakazawa
Wasaburo Ohta
Yuji Onodera
Kazuhiro Umeki
Wasaburo Ohta
Yuji Onodera
Kazuhiro Umeki
Application Number:
JP6577890A
Publication Date:
March 27, 2000
Filing Date:
March 16, 1990
Export Citation:
Assignee:
株式会社リコー
International Classes:
C23C14/32; (IPC1-7): C23C14/32
Domestic Patent References:
| JP254759A | ||||
| JP5538920A | ||||
| JP6092465A |
Attorney, Agent or Firm:
Toru Kabayama (1 person outside)