Title:
【考案の名称】焼成炉
Document Type and Number:
Japanese Patent JP3030398
Kind Code:
U
Inventors:
Kazuhiro Imai
Application Number:
JP426396U
Publication Date:
October 22, 1996
Filing Date:
April 19, 1996
Export Citation:
Assignee:
Imai Manufacturing Co., Ltd.
International Classes:
(IPC1-7): F27B17/00; F27B9/16; F27B9/30; G02F1/13; H01L21/324
Attorney, Agent or Firm:
Koichiro Suda (1 person outside)