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Title:
【発明の名称】高純度タンタル材,タンタルターゲット,薄膜および半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3031474
Kind Code:
B2
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Inventors:
Minoru Obata
Yoshiko Kohanawa
Application Number:
JP33480589A
Publication Date:
April 10, 2000
Filing Date:
December 26, 1989
Export Citation:
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Assignee:
Toshiba Corporation
International Classes:
C22C1/00; C22C1/02; C22C27/02; C23C14/34; H01L21/203; H01L21/205; (IPC1-7): C22C27/02; C22C1/00; C22C1/02; C23C14/34; H01L21/203; H01L21/205
Domestic Patent References:
JP62297463A
JP63238265A
Attorney, Agent or Firm:
Hideaki Togawa



 
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