Title:
【考案の名称】分子ポンプ
Document Type and Number:
Japanese Patent JP3038034
Kind Code:
U
More Like This:
| JPH0658293 | VACUUM PUMP |
| WO/2010/021307 | VACUUM PUMP |
| JP4689139 | Flywheel system with parallel pumping device |
Inventors:
Shoji Iguchi
Masatomo Okamoto
Sakurai Mitsuru
Masatomo Okamoto
Sakurai Mitsuru
Application Number:
JP1241496U
Publication Date:
June 06, 1997
Filing Date:
November 20, 1996
Export Citation:
Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
(IPC1-7): F04D19/04
Attorney, Agent or Firm:
Teruaki Koyama