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Title:
【発明の名称】流体の燃焼方法
Document Type and Number:
Japanese Patent JP3056819
Kind Code:
B2
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Inventors:
Masaji Bebe
Application Number:
JP11897491A
Publication Date:
June 26, 2000
Filing Date:
May 24, 1991
Export Citation:
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Assignee:
Toshiba Corporation
International Classes:
C23C16/00; F23G7/06; F23J15/00; F23J15/04; H01L21/205; (IPC1-7): F23G7/06
Domestic Patent References:
JP6362528A
JP195214A
JP62134414A
JP2119920A
Attorney, Agent or Firm:
Norio Ohgo



 
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