Title:
【発明の名称】静電チャック
Document Type and Number:
Japanese Patent JP3064653
Kind Code:
B2
Inventors:
Tetsuo Kitabayashi
Application Number:
JP8041692A
Publication Date:
July 12, 2000
Filing Date:
March 02, 1992
Export Citation:
Assignee:
Totou Equipment Co., Ltd.
International Classes:
B23Q3/15; H01L21/265; H01L21/68; H01L21/683; H02N13/00; (IPC1-7): H01L21/68; B23Q3/15; H01L21/265; H02N13/00
Domestic Patent References:
| JP5957446A | ||||
| JP61152497A |
Attorney, Agent or Firm:
Tomiho Inamoto (2 outside)