Title:
【発明の名称】電極材料及びそれを用いたプラズマ処理装置
Document Type and Number:
Japanese Patent JP3066783
Kind Code:
B2
Abstract:
A heat-resistive electrode material substantially consisting of 40 to 60 wt % of at least one of ZrB2 and TiB2, 20 to 50 wt % of BN, and not more than 30 wt % of AlN is disclosed. This heat-resistive electrode material is used in at least portions of electrodes of an apparatus having a plasma generating unit, e.g., an ion source, a plasma etching apparatus, or a plasma CVD apparatus, that contacts a plasma.
Inventors:
Masahiko Matsudo
Koshiishi
Kei Isozaki
Yutaka Hirashima
Koshiishi
Kei Isozaki
Yutaka Hirashima
Application Number:
JP33007292A
Publication Date:
July 17, 2000
Filing Date:
November 16, 1992
Export Citation:
Assignee:
東京エレクトロン株式会社
電気化学工業株式会社
電気化学工業株式会社
International Classes:
H01J1/48; C23C16/50; H01J37/32; H01J49/14; H01L21/205; H01L21/265; H01L21/302; H01L21/3065; (IPC1-7): H01L21/205; H01J1/48; H01L21/265; H01L21/3065
Domestic Patent References:
| JP59232994A | ||||
| JP63140085A | ||||
| JP63142627A | ||||
| JP63258086A | ||||
| JP4239121A | ||||
| JP4358074A | ||||
| JP3233826A |
Attorney, Agent or Firm:
Toshio Inoue