Title:
【発明の名称】高純度コバルトスパッタリングターゲット
Document Type and Number:
Japanese Patent JP3066886
Kind Code:
B2
Inventors:
Yuichiro Shindo
Application Number:
JP35736792A
Publication Date:
July 17, 2000
Filing Date:
December 24, 1992
Export Citation:
Assignee:
Japan Energy Co., Ltd.
International Classes:
C22C19/07; C25C1/08; (IPC1-7): C25C1/08; C22C19/07
Domestic Patent References:
| JP1104769A | ||||
| JP515226A | ||||
| JP4218912A | ||||
| JP4328824A |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)