Title:
【発明の名称】半導体圧力センサ
Document Type and Number:
Japanese Patent JP3071932
Kind Code:
B2
Inventors:
Satoru Ohata
Application Number:
JP5113892A
Publication Date:
July 31, 2000
Filing Date:
March 10, 1992
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01L9/04; G01L9/00; (IPC1-7): G01L9/04
Domestic Patent References:
| JP4212032A | ||||
| JP6427275A | ||||
| JP6336126A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)