【発明の名称】熱処理装置 - 東京エレクトロン株式会社

Title:

【発明の名称】熱処理装置

Document Type and Number:

Japanese Patent JP3076369

Kind Code:

B2

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Inventors:

Masaharu Abe

Application Number:

JP33565990A

Publication Date:

August 14, 2000

Filing Date:

November 30, 1990

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/31; H01L21/22; (IPC1-7): H01L21/22; H01L21/31

Domestic Patent References:

Attorney, Agent or Firm:

Saichi Suyama

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