Title:
【発明の名称】露光シミュレーション方法
Document Type and Number:
Japanese Patent JP3077657
Kind Code:
B2
Inventors:
Hirotomo Inui
Application Number:
JP36433997A
Publication Date:
August 14, 2000
Filing Date:
December 19, 1997
Export Citation:
Assignee:
NEC
International Classes:
G03F7/207; H01L21/00; H01L21/027; (IPC1-7): H01L21/027; G03F7/207
Domestic Patent References:
| JP982600A | ||||
| JP7175204A |
Attorney, Agent or Firm:
Shiroyuki Hori