Title:
【発明の名称】高周波誘導結合プラズマ装置用分割型トーチ
Document Type and Number:
Japanese Patent JP3083443
Kind Code:
B2
Abstract:
PURPOSE:To facilitate maintenance work and raise overall durability by separating a torch outer cylindrical portion susceptable to violent depletion, deterioration etc., due to plasma high temperature and so subjected to replacement repair, detachable from a torch and forming it with heat-resisting material. CONSTITUTION:An injector cylinder 11 for introducing a sample solution atomization carrier gas 6, an inner cylinder for introducing auxiliary gas 5 on its outer periphery and an outer cylinder for introducing plasma gas 4 on the outer periphery are disposed. The outer cylinder is then divided as a torch base portion 13a and a torch outer cylindrical portion 13b. The two are mutually support-fixed in butting at the position of a torch support arm 2. When plasma 7 due to excitation of internal gas with a load coil 3 becomes unstable and the touches inside of the outer cylindrical portion 13b, it then deforms because of the heat. And thus, the plasma 7 becomes more unstable. Or otherwise when the ignition is not good, the outer cylindrical portion 13b is easily replaceable. Accordingly, the maintenance becomes easy. And the outer cylindrical portion alone can be formed of a highly heat-resisting material and so the overall durability is raised.
Inventors:
Mitsuyasu Iwanaga
Application Number:
JP6086094A
Publication Date:
September 04, 2000
Filing Date:
March 30, 1994
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H05H1/30; G01N27/62; H01J27/16; H01J49/10; (IPC1-7): G01N27/62; H01J49/10; H05H1/30
Domestic Patent References:
| JP64699A | ||||
| JP3101043A | ||||
| JP6433654U |
Attorney, Agent or Firm:
Masanobu Ebikawa (7 others)