Title:
【発明の名称】スクリーンマスクの洗浄装置
Document Type and Number:
Japanese Patent JP3085097
Kind Code:
B2
Inventors:
Takaaki Sakaue
Michinori Tomomatsu
Michinori Tomomatsu
Application Number:
JP18225994A
Publication Date:
September 04, 2000
Filing Date:
August 03, 1994
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B41F15/08; B41F35/00; (IPC1-7): B41F35/00; B41F15/08
Domestic Patent References:
| JP4140143A | ||||
| JP5229110A | ||||
| JP5299812A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)