Title:
【発明の名称】真空チャンバー内ガス分析センサ
Document Type and Number:
Japanese Patent JP3086230
Kind Code:
B2
Abstract:
A sensor for measuring the relative amount of a specific gas within a vacuum chamber, comprising : - electron beam generator (20) providing an electron beam to excite within an interaction volume the atoms and molecules of said gas, whereby said atoms and molecules emit photons characteristic of said gas ; - means in communication with said chamber for conducting said gas to said electron beam ; - photodetector means (38) for viewing photons emitted by said atoms and molecules, including discriminating means (40) for selecting the photons of said wavelength and excluding others, and means for detecting the intensity of said photons and converting said intensity to a proportional electric signal ; - a thermal isolation barrier (33) of a low thermal conductivity, low thermal inertia material disposed over said electron beam generator (20) and interaction volume to facilitate rapid thermal stabilization of the surroundings of the interaction volume.
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Inventors:
Reybold Infikon Incorporated
Application Number:
JP25760989A
Publication Date:
September 11, 2000
Filing Date:
October 02, 1989
Export Citation:
Assignee:
Kazuhiro Kamihira
International Classes:
G01N21/62; G01L21/00; G01N23/225; G01Q30/02; G01Q30/12; G01Q30/16; (IPC1-7): G01N21/62
Domestic Patent References:
| JP62167873A | ||||
| JP5533720A | ||||
| JP63121732A | ||||
| JP60131949U |
Attorney, Agent or Firm:
Yoshihisa Oshida