Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JP3088033
Kind Code:
B2
Inventors:
Nobuhiko Sato
Takao Yonehara
Takao Yonehara
Application Number:
JP21657491A
Publication Date:
September 18, 2000
Filing Date:
August 02, 1991
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L27/06; H01L21/02; H01L21/336; H01L21/8249; H01L27/12; H01L29/786; (IPC1-7): H01L21/8249; H01L21/336; H01L27/06; H01L27/12; H01L29/786
Other References:
【文献】特許2608351(JP,B2)
Attorney, Agent or Firm:
Johei Yamashita