Title:
【発明の名称】ポジ型感光性樹脂組成物
Document Type and Number:
Japanese Patent JP3091802
Kind Code:
B2
Inventors:
Eiji Yoda
Hitoshi Yuasa
Hiroshi Ohtsuki
Hitoshi Yuasa
Hiroshi Ohtsuki
Application Number:
JP4819993A
Publication Date:
September 25, 2000
Filing Date:
March 09, 1993
Export Citation:
Assignee:
Nisseki Mitsubishi Corporation
International Classes:
C08L65/00; G03F7/023; H01L21/027; H05K3/00; (IPC1-7): G03F7/023; C08L65/00; H01L21/027; H05K3/00
Domestic Patent References:
| JP348250A | ||||
| JP6147819A | ||||
| JP6203317A |
Attorney, Agent or Firm:
Hajime Sakai