Title:
【発明の名称】チップ吸着装置
Document Type and Number:
Japanese Patent JP3092952
Kind Code:
B2
Inventors:
Masayuki Tanaka
Yuji Gomi
Yuji Gomi
Application Number:
JP843291A
Publication Date:
September 25, 2000
Filing Date:
January 28, 1991
Export Citation:
Assignee:
富士通株式会社
富士通カンタムデバイス株式会社
富士通カンタムデバイス株式会社
International Classes:
B65H5/08; H01L21/301; H01L21/52; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP62232935A | ||||
| JP6223448U | ||||
| JP6287447U |
Attorney, Agent or Firm:
Yasufumi Fukushima