Title:
【発明の名称】電界放射型素子の製造方法
Document Type and Number:
Japanese Patent JP3097527
Kind Code:
B2
Inventors:
Atsuo Hattori
Application Number:
JP30055595A
Publication Date:
October 10, 2000
Filing Date:
October 25, 1995
Export Citation:
Assignee:
Yamaha Corporation
International Classes:
H01J9/02; H01J1/30; H01J1/304; (IPC1-7): H01J9/02; H01J1/30
Domestic Patent References:
| JP471142A | ||||
| JP5507580A |
Other References:
Ｓｔｅｖｅｎ Ｍ．Ｚｉｍｍｅｒｍａｎ ａｎｄ Ｗａｙｎｅ Ｔ．Ｂａｂｉｅ，“Ａ Ｆａｂｒｉｃａｔｉｏｎ Ｍｅｔｈｏｄ ｆｏｒ ｔｈｅ Ｉｎｔｅｇｒａｔｉｏｎ ｏｆ Ｖａｃｕｕｍ Ｍｉｃｒｏｅｌｅｃｔｒｏｎｉｃ Ｄｅｖｉｃｅｓ”，ＩＥＥＥ ＴＲＡＮＳＡＣＴＩＯＮＳ ＯＮ ＥＬＥＣＴＲＯＮ ＤＥＶＩＣＥＳ ，１９９１年８月，第３８巻，第１０号，ｐ．２２９４−２３０３
Attorney, Agent or Firm:
Itami Masaru