Title:
【発明の名称】パターン形成方法
Document Type and Number:
Japanese Patent JP3119950
Kind Code:
B2
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Inventors:
Tsukasa Azuma
Application Number:
JP26179792A
Publication Date:
December 25, 2000
Filing Date:
September 30, 1992
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G03F7/38; G03F7/26; H01L21/027; (IPC1-7): G03F7/38; G03F7/26; H01L21/027
Domestic Patent References:
JP4363016A |
Attorney, Agent or Firm:
Takehiko Suzue