Title:
サーボ式静電容量型3軸センサ
Document Type and Number:
Japanese Patent JP3143271
Kind Code:
U
Inventors:
Satoshi Era
Kazuhiro Okada
Kazuhiro Okada
Application Number:
JP2008002376U
Publication Date:
July 17, 2008
Filing Date:
April 15, 2008
Export Citation:
Assignee:
Wako Co., Ltd.
International Classes:
G01P15/125; G01P15/13; G01P15/18
Attorney, Agent or Firm:
Seiji Sugiyama