Title:
【発明の名称】半導体装置の制御方法
Document Type and Number:
Japanese Patent JP3158495
Kind Code:
B2
Inventors:
Shinichi Yamada
Application Number:
JP14863091A
Publication Date:
April 23, 2001
Filing Date:
June 20, 1991
Export Citation:
Assignee:
KABUSHIKI KAISHA MEIDENSHA
International Classes:
H01L29/744; H01L29/74; (IPC1-7): H01L29/744
Domestic Patent References:
| JP468573A | ||||
| JP2232969A | ||||
| JP63205954A | ||||
| JP5420654A | ||||
| JP4370976A |
Other References:
【文献】特許3049837(JP,B2)
Attorney, Agent or Firm:
Fujiya Shiga (1 person outside)