Title:
【発明の名称】三次元スキャニングシステム
Document Type and Number:
Japanese Patent JP3161602
Kind Code:
B2
Abstract:
A part scanning and part calibration method for the inspection of printed circuit boards and integrated circuits includes a camera and two rotating mirrors to scan an image of a pattern mask retical upon which a precise pattern has been deposited. Small parts are placed upon the retical to be inspected. The third overhead mirror is provided to view the part under inspection from another perspective. The scene of the part is triangulated and the dimensions of the system can thus be calibrated. A precise retical mask is provided with dot patterns which provide an additional set of information needed for calibration. By scanning more than one dot pattern the missing state values can be resolved using an iterative trigonomic solution.
Inventors:
Beatty, Elwin, M.
Palm, Stephen, Gee.
Palm, Stephen, Gee.
Application Number:
JP50043893A
Publication Date:
April 25, 2001
Filing Date:
May 19, 1992
Export Citation:
Assignee:
Beatty, Elwin, M.
International Classes:
G01B11/02; G01N21/88; G02B26/10; H04N1/19; G01N21/93; G01N21/956; (IPC1-7): G02B26/10; H04N1/19
Other References:
【文献】米国特許4738175(US,A)
Attorney, Agent or Firm:
Masao Okabe (4 others)