熱処理装置 - 東京エレクトロン株式会社

Title:

熱処理装置

Document Type and Number:

Japanese Patent JP3180048

Kind Code:

U

Inventors:

Mizunaga Koichi
Kazuhiko Oshima

Application Number:

JP2012005723U

Publication Date:

November 29, 2012

Filing Date:

September 20, 2012

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/027

Attorney, Agent or Firm:

Kikuhiko Nakamoto

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