Title:
【発明の名称】液体気化装置
Document Type and Number:
Japanese Patent JP3181591
Kind Code:
B2
Abstract:
PCT No. PCT/JP93/01353 Sec. 371 Date Jul. 25, 1994 Sec. 102(e) Date Jul. 25, 1994 PCT Filed Sep. 21, 1993 PCT Pub. No. WO94/06529 PCT Pub. Date Mar. 3, 1994.A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
Inventors:
Naoyuki Suenaga
Toru Yamaguchi
Koichiro Tsutahara
Toru Yamaguchi
Koichiro Tsutahara
Application Number:
JP50797794A
Publication Date:
July 03, 2001
Filing Date:
September 21, 1993
Export Citation:
Assignee:
Mitsubishi Electric Corporation
Ryoden Semiconductor System Engineering Co., Ltd.
Ryoden Semiconductor System Engineering Co., Ltd.
International Classes:
B01D1/00; B01D1/14; B01D1/26; H01L21/205; B01D3/34; B01J7/02; C23C16/448; G06F1/26; G11C7/00; G11C11/407; G11C29/00; G11C29/06; H01L21/31; (IPC1-7): H01L21/205; B01J7/02; C23C16/448
Domestic Patent References:
| JP5171447A | ||||
| JP6444011A | ||||
| JP637620A | ||||
| JP4218675A | ||||
| JP2217474A | ||||
| JP34929A | ||||
| JP6483666A | ||||
| JP697081A | ||||
| JP392775U |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)