Title:
ヘリウムガスを用いた封入・検査・回収装置
Document Type and Number:
Japanese Patent JP3188841
Kind Code:
U
Inventors:
Noda Isamu
Okuyama Shigeru
Takamine Masayuki
Atsushi Osawa
Okuyama Shigeru
Takamine Masayuki
Atsushi Osawa
Application Number:
JP2013006180
Publication Date:
February 13, 2014
Filing Date:
October 29, 2013
Export Citation:
Assignee:
Noda Seiki Co., Ltd.
International Classes:
G01M3/20
Attorney, Agent or Firm:
Atsushi Osawa
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