Title:
【発明の名称】エッチング方法
Document Type and Number:
Japanese Patent JP3190327
Kind Code:
B2
Inventors:
Kenji Tateiwa
Application Number:
JP23487590A
Publication Date:
July 23, 2001
Filing Date:
September 04, 1990
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/302; H01L21/3065; H01L21/3205; H01L21/3213; (IPC1-7): H01L21/3065; H01L21/3213
Domestic Patent References:
| JP63197327A | ||||
| JP2150027A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)