Title:
【発明の名称】堆積ヒーター
Document Type and Number:
Japanese Patent JP3301757
Kind Code:
B2
Abstract:
A gaseous deposition source for providing a deposition material that emanates from a crucible having mulitple thin film heating elements formed thereon, with each adjacent pair being separated by an insulating layer therebetween. A gaseous deposition source can have a crucible with a cover thereon with one or more apertures therein and with thin film heating elements on that cover about such apertures. A substrate heater may be used formed of thin film heating elements provided on a base.
Inventors:
Chow, Lauren A.
Application Number:
JP51318790A
Publication Date:
July 15, 2002
Filing Date:
September 07, 1990
Export Citation:
Assignee:
Chow, Lauren A.
International Classes:
C23C14/24; F27B14/12; F27B14/14; F27B14/00; F27B14/10; F27D99/00; (IPC1-7): C23C14/24; F27B14/12
Other References:
【文献】米国特許4543467(US,A)
【文献】米国特許3525452(US,A)
【文献】米国特許3525452(US,A)
Attorney, Agent or Firm:
Michito Hiraki (1 person outside)