【発明の名称】投影露光装置、走査露光方法、及び素子製造方法

Title:

【発明の名称】投影露光装置、走査露光方法、及び素子製造方法

Document Type and Number:

Japanese Patent JP3316704

Kind Code:

B2

Abstract:

A scanning exposure apparatus and method uses an optical member to change an intensity distribution of exposure light in an illumination region.

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Inventors:

Shoichi Tanimoto

Application Number:

JP13848993A

Publication Date:

August 19, 2002

Filing Date:

June 10, 1993

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20

Domestic Patent References:

Attorney, Agent or Firm:

Satoshi Ohmori

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